Figure 2 | Scientific Reports

Figure 2

From: Comparative Analysis on Dielectric Gold and Aluminium Triangular Junctions: Impact of Ionic Strength and Background Electrolyte by pH Variations

Figure 2

Detailed fabrication step for the development of a dielectric sensor. Initially, starts with wafer cleaning followed by the oxidation process for oxide layer formation. Thin film aluminium/gold deposition as transducer material then photoresist coating. UV exposure was carried out to transfer the exact design of dielectric electrode. Later, etching process was performed followed by washing with acetone then with deionized water. In-depth serial steps involved in the fabrication process were specified.

Back to article page