Table 1 Associated parameters for evaluating EDD – EF at each Si-δ-doping layer and ΔV across tS for samples with various tS at 300 K.
tS (nm) | n2D/2 (1012 cm−2) | nSD/2 (1012 cm−2) | nDD/2 (1012 cm−2) | f(EDD) | EDD—EF (meV) | F (104 V/cm) | ΔV (mV) |
---|---|---|---|---|---|---|---|
5 | 0.631 ± 0.001 | 0.42 ± 0.02 | 0.21 ± 0.02 | 78.4 ± 1.6% | − 33 ± 2 | 9.32 ± 0.01 | 47 |
10 | 0.559 ± 0.005 | 0.42 ± 0.02 | 0.14 ± 0.02 | 85.6 ± 2.7% | − 45 ± 6 | 8.27 ± 0.07 | 83 |
15 | 0.548 ± 0.001 | 0.42 ± 0.02 | 0.12 ± 0.02 | 87.6 ± 2.7% | − 50 ± 6 | 8.09 ± 0.01 | 121 |