Figure 3
Annealing behaviors of S for Mg-implanted GaN before and after UHPA. Results for Mg-implanted GaN annealed with protective capping layer are also shown23.
Figure 3 | Scientific Reports
Annealing behaviors of S for Mg-implanted GaN before and after UHPA. Results for Mg-implanted GaN annealed with protective capping layer are also shown23.
