Figure 3

Angular distribution of the scattering for different thicknesses: (a) shows differential intensity per solid angle plotted over scattering angle obtained by azimuthal averaging of energy-filtered diffraction patterns (example shown for Si with a thickness of \(85\,\mathrm {nm}\)) Black: unfiltered; blue: zero loss; red: plasmon loss. (b) Displays the ratios of plasmon-loss and zero-loss intensities for all thickness steps in the Si, while (c) shows these ratios after a normalisation of both signals as described in the text. (d) Shows the differential intensity plotted over scattering angle for Pt with a thickness of \(13\,\mathrm {nm}\). Black: unfiltered; blue: zero loss; red: plasmon loss. In (e) the ratio of plasmon-loss and zero-loss intensities for two thicknesses are displayed, while (f) shows the normalized ratios. The vertical lines in each plot represent the semi-convergence angles used at 300 kV (solid line) and 200 kV (dashed line), respectively.