Figure 6
Approximation of the plasmon-excitation simulation by diffraction pattern convolution: (a) displays the result of the convolution calculation in Eq. (3) in comparison with the results of the full simulation as represented by Eq. (2). In (b) the normalised ratio between zero-loss and plasmon-loss signal is shown for both methods. Corresponding to the smallest thickness in Fig. 3, the calculations are done for [100] Si of \(30\,\mathrm {nm}\) thickness. The convolution is able to approximate the full simulation with high accuracy for the angle range of 0–\(35\,\mathrm {mrad}\) as can be seen in (b). This is remarkable, because the scattering probability has dropped up to five magnitudes for this scattering angle as marked in Fig. 5.
