Figure 8

Quality of fit (RMSE—the smaller the better—see section “Methods”) along sample ‘D’ (\(\hbox {p}_H\)/p\(=0.2\)). The RMSE values related to the CL and TL models are shown using blue and red dotted lines, respectively. For both models, the best fit was achieved by using a graded layer, resulting in low values of inhomogeneity inside the a-\(\hbox {Si}_{1-x}\,\hbox {Ge}_{{x}}\) layer. On the right-hand side, the percentage of the inhomogeneity is presented for both models.