Table 2 Typical parameter values obtained using CL parameterization with confidence limits of 90% for sample ‘A’.
Measurment place parameter | Si-rich end | \(x=0.5\) | Ge-rich end |
|---|---|---|---|
\(\varepsilon _1(\infty )\) | 0.44 ± 0.01 | 0.41 ± 0.01 | 0.30 ± 0.01 |
A (eV) | 115.82 ± 0.74 | 93.75 ± 0.37 | 101.78 ± 0.34 |
\(\Gamma \) (eV) | 2.701 ± 0.003 | 3.355 ± 0.006 | 4.012 ± 0.007 |
\(\hbox {E}_0\) (eV) | 3.680 ± 0.003 | 3.896 ± 0.003 | 3.561 ± 0.004 |
\(\hbox {E}_g\) (eV) | 0.949 ± 0.003 | 0.847 ± 0.004 | 0.692 ± 0.004 |
\(\hbox {E}_p\) (eV) | 1.95 ± 0.02 | 0.95 ± 0.01 | 0.76 ± 0.01 |
\(\hbox {d}_{{SiGe}}\) (nm) | 101.58 ± 0.13 | 105.85 ± 0.14 | 106.87 ± 0.15 |
\(\hbox {d}_{{ox}}\) (nm) | 2.66 ± 0.02 | 3.57 ± 0.03 | 3.21 ± 0.03 |
Inhomogeneity (%) | 0.26 ± 0.02 | 2.39 ± 0.05 | 2.28 ± 0.05 |
RMSE | 2.46 | 3.13 | 3.00 |
