Figure 4
From: Demonstration of nearly pinhole-free epitaxial aluminum thin films by sputter beam epitaxy
With varying growth pressure: (a) XRD; (b) XRR thickness (Kiessig) fringes and rocking curve (inset) for sample grown at 15mTorr; (c) AFM images (left to right: 5, 12, 14.5, 15, 18, 30 mTorr).
