Figure 1 | Scientific Reports

Figure 1

From: In-situ spatial and temporal electrical characterization of ZnO thin films deposited by atmospheric pressure chemical vapour deposition on flexible polymer substrates

Figure 1

In-situ electrical measurement system. A flexible PCB substrate is placed on the oscillating substrate stage of an AP-SALD/CVD system and electrical resistance is measured at 20 trace pairs, shown in red, across the substrate throughout the deposition of a thin film. Most of the trace is covered by polyimide, the exposed area is shown in blue, dimensions of the PCB substrate can be found in Fig. S1.

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