Figure 5

Scanning electron micrographs of the microwell molds. (a) Top view of a single 400 µm microwell mold. (b, c) Top and side views of microwells with a height of 400 µm. (d, e) Side view of a 300 µm microwell before and after PMMA coating. (f) An example of the failure in the PMMA layer causes by bubble formation.