Table 2 Fitting results for the raw and predicted NR data.
| Â | Â | Standard | Low-count | Predicted |
|---|---|---|---|---|
Layer 1 | SLD/10\(^{-4}\) \(\hbox {nm}^{-2}\) | \(6.79 \pm 0.011\) | \(6.84 \pm 0.090\) | \(6.80 \pm 0.059\) |
Thickness/nm | \(62.2 \pm 0.034\) | \(61.8 \pm 0.186\) | \(62.1 \pm 0.228\) | |
Roughness/nm | \(0.42 \pm 0.013\) | \(0.234 \pm 0.185\) | \(0.243 \pm 0.076\) | |
Layer 2 | SLD / 10\(^{-4}\) \(\hbox {nm}^{-2}\) | \(1.19 \pm 0.010\) | \(0.905 \pm 0.493\) | \(1.13 \pm 0.059\) |
Thickness/nm | \(4.35 \pm 0.087\) | \(4.51 \pm 0.292\) | \(4.15 \pm 0.055\) | |
Roughness/nm | \(1.22 \pm 0.049\) | \(0.904 \pm 0.264\) | \(1.57 \pm 0.275\) | |
Silicon oxide\(^a\) | SLD / 10\(^{-4}\) \(\hbox {nm}^{-2}\) | 3.47 | 3.47 | 3.47 |
Thickness/nm | 1.60 | 1.60 | 1.60 | |
Roughness/nm | 0.40 | 0.40 | 0.40 | |
Substrate\(^a\) | SLD / 10\(^{-4}\) \(\hbox {nm}^{-2}\) | 2.07 | 2.07 | 2.07 |
Thickness/nm | \(\infty\) | \(\infty\) | \(\infty\) | |
Roughness/nm | 0.30 | 0.30 | 0.30 |