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Figure 2

From: Photo-oxidative degradation of polyacids derived ceria nanoparticle modulation for chemical mechanical polishing

Figure 2

(a) Changes in FTIR spectrum of carbonyl band and (b) absorbance spectra of ceria slurry with 0.1 wt.% of PMA (left) and PAA (right) during UV-irradiation for 120 min. (c) XPS spectra of ceria slurry with 0.1 wt.% of PAA according to UV irradiation time; (top) 0 min, (middle) 60 min, and (bottom) 120 min. (d) Changes in dissolved oxygen during UV irradiation on fabricated ceria slurry for 120 min.

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