Figure 14
Depths for the holes I, II, III and IV are the average value for all sectional views for each hole. Four holes were cut under application of the 400 \(\upmu \mathrm{N}\) pressing load when the four resistance values in the phase shifter were set as 15 \(\mathrm{k}\Omega \), 20 \(\mathrm{k}\Omega \), 25 \(\mathrm{k}\Omega \) and 30 \(\mathrm{k}\Omega \), respectively. The corresponding amplitudes were 17 nm, 21 nm, 32 nm and 48 nm, respectively.
