Figure 2

Photo (a) and Schematic diagram (b) of redesigned microcantilever. The length, width and thickness of the base step are 1.7 mm, 2 mm and 50 \(\upmu \)m, respectively. The length, width and thickness of the microcantilever are 850 \(\upmu \)m, 50 \(\upmu \)m and 50 \(\upmu \)m, respectively.