Figure 2

Low-magnification cross-sectional scanning TEM images of mesa sidewalls: (A) before diluted HF chemical treatment, (B) after diluted HF (4 min) treatment, (C) I–V characteristic curve of three different AlGaInP-based \(\upmu\)-LEDs as a function of applied bias voltage (the legend describes the diluted HF treatment time and Ref. indicates a treatment of 0 min). The inset shows light-emission photographs and I–V versus the log scale.