Figure 5

STEM-EDX analysis of mesa sidewalls (white box indicates mapping area in (A) and (D)). EDX spectra on mesa sidewalls (B) before diluted HF solution treatment and (E) after diluted HF (4 min) treatment; a.u. arbitrary units. EDX elemental (C, O, and Cl) mapping for mesa sidewalls (C) before diluted HF solution treatment and (F) after diluted HF (4 min) treatment.