Figure 7
AFM images of patterns written with various doses in interferometric configuration: (a) 2.5 mJ/cm2, (b) 5 mJ/cm2, (c) 7.5 mJ/cm2, (d) 15 mJ/cm2. Period 500 nm. (e) Variation of the pattern height with the dose. (f) Schematic interpretation of the evolution of the pattern structure with the irradiation dose. Initial film thickness 80 nm. The solution has a molar ratio Si/Ti = 6/1 and the MNPs concentration was 0.4 vol%.
