Figure 9

(a) Variation of the pattern height with the dose for two content of Ti complex in the material: Si/Ti = 3/1 and 6/1 molar. Initial film thickness was 80 nm, period 500 nm, MNP: 0.4 vol%. (b) and (c) are AFM images of the patterns for the optimal dose, respectively for Si/Ti = 3/1 and 6/1.