Figure 2
From: Enhanced ferroelectric switching speed of Si-doped HfO2 thin film tailored by oxygen deficiency
Cross-sectional images of orthorhombic HfO2 using the high-resolution scanning transmission electron microscopy (a) along zone axis [121] of the LTA film and (b) along zone axis [323] of the HTA film. (c) Valence electron energy-loss spectroscopy results and (d) O K edges showing different intensity ratio of peaks in the LTA (green) and HTA (orange) films. Insets show the double-peaked shape of the O K edges. (e) Box plots of the intensity ratios of peak A, B (left), and C, D (right).
