Figure 3
From: Enhanced ferroelectric switching speed of Si-doped HfO2 thin film tailored by oxygen deficiency
Macroscopic electrical properties of the HfO2 films. (a) Polarization–voltage hysteresis of the LTA (green line) and HTA (orange line) films. (b) Capacitance–voltage measurement of the LTA (green squares) and HTA (orange squares) films.
