Figure 6

The silicon spherical resonator of Fig. 1 as loaded on the metal substrate. The substrate sag outlined by the overlying resonator body is characterized by the depth \(d_ t\). For numerical purposes we consider a silver substrate.
The silicon spherical resonator of Fig. 1 as loaded on the metal substrate. The substrate sag outlined by the overlying resonator body is characterized by the depth \(d_ t\). For numerical purposes we consider a silver substrate.