Table 2 Model geometric parameters.
Parameter | Description | Value | Unit |
|---|---|---|---|
cyl_H | Gas chamber height | 10 | mm |
cyl_R | Gas chamber radius | 3 | mm |
in_R | Gas input channel radius | 1 | mm |
tube_H | Gas input/output channel height | 1 | mm |
out_R | Gas output channel radius | 1 | mm |
chip_L | Length of the sensor substrate | 1 | mm |
chip_W | Width of the sensor substrate | 2 | mm |
chip_H | Height of sensor substrate | 0.1 | mm |
Front_H | Sensing layer thickness | 0.01 | mm |
