Figure 5
From: Noble metal alloy thin films by atomic layer deposition and rapid Joule heating
Cross-sectional TEM–EDX elemental mappings of the Rh–Ir alloy thin film. (a) Dark field STEM, (b) overlapping image, (c) Al k⍺1, (d) Rh L⍺1, (e) O K⍺1, (f) Ir M⍺1, (g) Mo L⍺1, (h) Pt M⍺1. (i) TEM image with a line indicating the EDX line scan position. (j) EDX line scan with Rh Kα and Ir Kα signals over a distance of 85 nm of the alloy thin film.
