Figure 5 | Scientific Reports

Figure 5

From: Enhanced photonics devices based on low temperature plasma-deposited dichlorosilane-based ultra-silicon-rich nitride (Si8N)

Figure 5

(a) Schematic and (b) optical micrograph of the racetrack ring resonators. (c) Measured transmission spectrum of ring resonator with H = 400 nm, W = 1000 nm, R = 100 μm, G = 200 nm, racetrack length, LR = 30 μm. (d) Lorentzian fitting of a single resonance. (e) Group index spectrum of the resonator. (f) Simulated mode profile for Si8N waveguide at 1557 nm. (g) Simulated real (blue) and imaginary (orange) effective refractive index for Si8N waveguide (W = 1000 nm, H = 400 nm). (h) Simulated group index for Si8N waveguide (W = 1000 nm, H = 400 nm).

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