Figure 5
From: ITO film stack engineering for low-loss silicon optical modulators
(a) Ellipsometry model measurement scheme; (b) ITO (type3) ψ and Δ at wavelength of 1550 nm; (c) ψ; (d) Δ of the multilayer stack in the wavelength range from 1400 to 1600 nm at voltages of − 16 V and + 16 V; (e) film types 1–3 accumulation layer n and k in the wavelength range from 550 to 1600 nm at voltages of 0, + 16 and − 16 V.
