Figure 1
From: Interdisk spacing effect on resonant properties of Ge disk lattices on Si substrates
(a–c) SEM images of Ge disks with diameters of about 200 nm at their base and a height of about 136 nm. The distance between the disk centers was 300, 500 and 700 nm in (a–c), respectively. The images are taken at the sample inclination angle of 45°. (d) SEM image of close-spaced Ge disks with a height of 90 nm obtained at a normal e-beam incidence angle. (e) Schematic cross-section of the structure. (f) Dependence of the disk diameter at their base on the G value.
