Figure 4

(a) The layer structure of an assembly used for laser patterning of parylene C films. SEM images of the boundary surface at (b) top and (c) bottom of the film. Roughness images of (d) top and (e) bottom of film using AFM. Schematic diagrams of sliding test to compare the roughness between (f) top and (g) bottom of the film. (h) Examples demonstrating various patterns with 4 μm parylene C film using laser patterning: honeycomb, re-entrant auxetic, and serpentine structures.