Figure 4
From: Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films
(a) SEM image of the porous SiO2 surface on a bendable SiO2/Si film, (b) HRTEM image of the interface of the SiO2/Si film (insets: FFT SAED patterns of the SiO2 part (i) and Si part (ii)), and (c) the image of the freestanding bendable porous SiO2/Si film.
