Figure 6 | Scientific Reports

Figure 6

From: Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films

Figure 6

(a) Humidity sensing properties as a function of RH at the frequencies of 100 k, 500 k, and 1 MHz, (b) hysteresis characteristics for the adsorption and desorption at a frequency of 100 kHz, (c) a single sensing curve at 100 kHz in 71.4% RH, and (d) Nyquist plots for the RH levels of 1.8%, 53.4% and 84.5% (inset: the equivalent circuit model of the porous SiO2/Si film).

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