Figure 7
From: Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films
(a) The repeated humidity sensing test of 10 cycles at a frequency of 100Â kHz for 71.4% RH, and (b) long-term stability test of the capacitance as a function of time for humidity sensing at the frequency of 100Â kHz for 53.4% RH.
