Table 1 Details and ID of prepared samples.
From: Advanced microstructure, morphology and CO gas sensor properties of Cu/Ni bilayers at nanoscale
ID | Yield | Sputtering parameters | Sputtering time (min) | ||
|---|---|---|---|---|---|
basic pressure (n/m2) | Work pressure (N/m2) | Power (Watt) | |||
#1 | Cu | 103 | 3.5 | 80 | 30 |
#2 | Cu/Ni | 103 | 2.5 | 150 | 30/15 |
#3 | Cu/Ni | 103 | 2.5 | 150 | 30/20 |
