Table 3 ISO surface parameters were obtained from the AFM topographical maps of the films.

From: Advanced microstructure, morphology and CO gas sensor properties of Cu/Ni bilayers at nanoscale

Parameter

Unit

Cu

CuNi15

CuNi20

Smr

(%)

100

100

100

Smc

(nm)

8.43

10.5

12.7

Sdq

(–)

7.11

17.02

21.30

Sdr

(%)

229

778

945

Spd

(1/µm2)

436

557

755

Spc

(1/µm)

612

782

925

Sk

(nm)

8.47

19.50

23.7

Spk

(nm)

5.01

16.17

22.4

Svk

(nm)

7.80

13.80

23.64

Vmp

(µm3/µm2)

1.29 × 10–3

2.99 × 10–3

3.86 × 10–3

Vmc

(µm3/µm2)

2.81 × 10–3

68.59 × 10–3

82.65 × 10–3

Vvc

(µm3/µm2)

36.10 × 10–3

97.69 × 10–3

114.0 × 10–3

Vvv

(µm3/µm2)

3.67 × 10–3

7.80 × 10–3

10.64 × 10–3