Table 1 Device parameters of the MEMS gravimeter.
From: A 19 day earth tide measurement with a MEMS gravimeter
Parameter | Value |
|---|---|
Frequency (f) | 7.35 Hz |
Proof mass length | 12.42 mm |
Proof mass height | 4.82 mm |
Proof mass thickness | 240 \(\upmu \)m |
Pick-up gap | 30–40 \(\upmu \)m |
Comb area (\(A_{\text {comb}}\)) | 4.34E−05 \(\hbox {m}^2\) |
Drive voltage (\(V_{\text {pp}}\)) | 4 V |
Drive frequency | 40 kHz |
