Figure 4
From: Tuning of silicon nitride micro-cavities by controlled nanolayer deposition
Sketch of the experimental setup: light from broadband fs laser or tunable CW laser is coupled to the lensed fiber. Lensed fiber injects the light into the Si3N4 micro-cavity device. At the output of the device the transmitted light is collected and collimated with 50 × objective (Objective 1). Then the light is sent either to the photodetector (for tunable CW laser) or to the optical spectral analyzer (OSA) via a single-mode fiber (for fs laser). The 532 nm pump laser is focused onto the micro-cavity device by 100 × objective (Objective 2) for confocal and heating measurements.
