Figure 2
Experimental Rutherford backscattering spectra in (a) the geometry with an exit angle of 21° and (b) glancing exit geometry of the nanostructures pre-treated with DMA-TMS followed by 300 s of Ru CVD.
Figure 2 | Scientific Reports
Experimental Rutherford backscattering spectra in (a) the geometry with an exit angle of 21° and (b) glancing exit geometry of the nanostructures pre-treated with DMA-TMS followed by 300 s of Ru CVD.
