Figure 4 | Scientific Reports

Figure 4

From: Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

Figure 4

(a) Zoom-in on the ruthenium signal for the RBS spectrum on the nanostructures of Fig. 1c. Four simulated sub-spectra that contribute to the summed spectrum are plotted in different colors—their trajectories are drawn on the sample model with the same colors. The labels correspond to the horizontal starting point of the trajectories within STRUCTNRA. (b) The Ru contributions originating from different sites (bottom trenches, oxide sidewalls and oxide top surfaces) are plotted.

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