Table 2 Average grain size along (012) plane strain (ε), and dislocation density (δ).
Deposition angle | FWHM (deg) | D (nm) | δ (nm)−2 × 10–2 | ε × 10–2 |
---|---|---|---|---|
0° | 0.305 | 25.27 | 0.156 | 0.1298 |
10° | 0.303 | 25 | 0.159 | 0.1300 |
30° | 0.309 | 24.95 | 0.161 | 0.1312 |
70° | 0.382 | 20.18 | 0.245 | 0.1620 |