Table 2 Coupling properties with different gap widths.

From: Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides

Waveguide width (nm)

50

100

150

200

Slop (\(\%/\upmu \)m)

− 32.83

− 28.65

− 22.34

− 19.14

\(R^{2}\)

0.9957

0.9964

0.9927

0.9917

Linear range (\(\upmu \)m)

1.04

1.55

2.44

3.10

\(L_{T}\) (\(\upmu \)m)

0.87

1.55

2.13

2.84

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