Table 2 Performance parameters of PnC sensor when sensing 0—9.1% acetone concentration.
From: High-performance phononic crystal sensing structure for acetone solution concentration sensing
n (%) | Resonant Frequency (Hz) | Qf | Sn% (Hz) | FOM |
|---|---|---|---|---|
0 | 41,094 | 24,315.98 | – | – |
1 | 41,666 | 19,388.55 | 57,200.00 | 26,617.03 |
3 | 43,499 | 43,525.12 | 80,166.67 | 80,214.80 |
6 | 43,220 | 37,589.15 | 35,433.33 | 30,816.96 |
8 | 43,462 | 45,667.75 | 29,600.00 | 31,102.24 |
9.1 | 43,595 | 45,793.06 | 27,483.52 | 28,869.24 |
