Table 3 Performance parameters of PnC sensor when sensing 10–100% acetone concentration.
From: High-performance phononic crystal sensing structure for acetone solution concentration sensing
n (%) | Resonant Frequency (Hz) | Qf | Sn% (Hz) | FOM | |
|---|---|---|---|---|---|
0 | 41,094 | 24,315.98 | – | – | |
10 | 43,534 | 43,373.52 | 24,400.00 | 24,310.05 | |
15 | 43,121 | 18,043.01 | 13,513.33 | 5654.35 | |
25 | 41,483 | 61,438.09 | 1566.00 | 2304.50 | |
30 | 40,624 | 26,570.74 | 1566.67 | 1024.70 | |
50 | 37,587 | 33,422.55 | 7014.00 | 6236.88 | |
70 | 35,512 | 16,143.92 | 7970.00 | 3622.89 | |
90 | 34,040 | 35,835.35 | 7837.77 | 8251.16 | |
100 | 33,322 | 17,071.57 | 7772.00 | 3981.76 | |
