Figure 2
From: Beyond 5 GHz excitation of a ZnO-based high-overtone bulk acoustic resonator on SiC substrate
SEM cross-sectional micrograph of ZnO film grown on (a) Pt/Ti/Si substrate, (b) Pt/Ti/SiC substrate, and (c) AFM image of ZnO film grown on Pt/Ti/SiC substrate.
