Table 1 Comparison of dispersion engineering for Si3N4 waveguides.
From: Flexible dispersion engineering using polymer patterning in nanophotonic waveguides
Scheme | Demonstrated dispersion (ps/nm/km) | Q | Dispersion regime | Reconstructability |
|---|---|---|---|---|
Waveguide geometry | ||||
447 to − 674 | N/A | Normal/Anomalous | No | |
≈ 80 to 0 | N/A | Anomalous | No | |
≈ 118 to 0 | N/A | Anomalous | No | |
− 70 | N/A | Normal | No | |
ALD/Sputtering cladding | ||||
52 to − 27 | 106 | Normal/Anomalous | No | |
− 219 to − 827 | 106 | Normal | No | |
46 to − 213 | 105 | Normal/Anomalous | No | |
Patternable polymer | ||||
− 143 to − 257 | 1.6 × 105 (104 with polymer cladding) | Normal | Yes | |
This work | 409 to − 462 | 1.0 × 105 (1.7 × 105 with polymer cladding) | Normal/Anomalous | Yes |
