Table 1 Related parameters of the Al particles and SI substrate.

From: The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning

Material

Thermal conductivity/pW μm−1 K−1

Density/kg μm−3

Specific heat capacity/pJ kg−1 K−1

Poisson's ratio

Young’s modulus/MPa

Thermal expansivity

AL

237 × 106

2700 × 10–18

880 × 1012

0.330

70 × 103

23.21 × 10–6

Si

150 × 106

2328 × 10–18

618 × 1012

0.278

190 × 103

0.50 × 10–6