Figure 1
(a) Array element of metamaterial with design resonance frequency \(f_\text{R}\,=\,600\) GHz, inner radius \(r\,=\,46\,\upmu\)m, arc width \(w\,=\,10\,\upmu\)m, gap angle \(\varphi _\text{g}\,=\,22^\circ\), offset angle \(\varphi _\text{o}=\,42^\circ\), periodicity of the unit cell \(p\,=\,202\,\upmu\)m and number of elements per query field \(n\,=\,145\). (b) Cross section of the resonator, visualizing the \(3\,\upmu\)m deep undercut-etch and the sensor composition: from top to bottom: chromium (10 nm), gold (200 nm), chromium (10 nm), fused silica (\(500\,\upmu\)m). The dimensions are not depicted to scale. (c) Localized electric field concentration along the cross section of the resonator element. High field concentration displayed in yellow, low field concentration displayed in blue.
