Table 1 The data related to the optical parameters such as chromatic and spherical aberrations (Cc and Cs) and the image position (Xc), calculated by FEM, FOEM and SOEM, for six different typical electrostatic lens systems (presented in Fig. 5).
From: A new approach for fast field calculation in electrostatic electron lens design and optimization
Systems | System1 | System2 | System3 | System4 | System5 | System6 |
|---|---|---|---|---|---|---|
Xc (mm) | ||||||
FEM | 8.92 | 8.26 | 9.65 | 13.39 | 10.03 | 15.43 |
FOEM | 8.87 | 8.29 | 9.61 | 13.12 | 9.97 | 15.39 |
SOEM | 9.12 | 8.62 | 9.87 | 13.78 | 10.35 | 15.65 |
Cc (mm) | ||||||
FEM | 18.71 | 15.26 | 23.73 | 26.13 | 1.82 | 0.98 |
FOEM | 18.85 | 15.35 | 23.45 | 27.79 | 1.89 | 0.94 |
SOEM | 19.45 | 16.80 | 24.10 | 18.78 | 2.03 | 0.77 |
Cs (mm) | ||||||
FEM | 21.13 | 54.70 | 22.88 | 217.65 | 7.14 | 12.48 |
FOEM | 21.98 | 56.85 | 21.82 | 206.65 | 7.47 | 11.02 |
SOEM | 30.77 | 104.58 | 37.07 | 392.57 | 13.19 | 11.77 |
