Table 1 The number of defects of each order in the regions shown in Fig. 3: 0th order VBk < 50 V, 1st order VBk 50–600 V, 2nd order VBk 600–1000 V, and good devices with only higher order defects (VBk ≥ 1000 V).
From: Detecting defects that reduce breakdown voltage using machine learning and optical profilometry
Defect order | Region 1 | Region 2 | Region 3 | |||
|---|---|---|---|---|---|---|
0th order | 78 | 5.3% | 239 | 20.5% | 311 | 35.3% |
1st order | 71 | 4.8% | 134 | 11.5% | 117 | 13.3% |
2nd order | 592 | 40.3% | 625 | 53.7% | 364 | 41.4% |
Good device | 727 | 49.5% | 166 | 14.3% | 88 | 10.0% |
