Table 3 Variables and acronyms used in this paper.
From: Detecting defects that reduce breakdown voltage using machine learning and optical profilometry
Acronym | Full form |
|---|---|
ML | Machine learning |
TCAD | Technology computer-aided design |
CV | Capacitance–voltage |
IV | Current–voltage |
MOCVD | Metal–organic chemical vapor deposition |
RMS | Root mean square |
ESD | Generalized extreme studentized deviate (for outlier detection) |
LED | Light emitting diode |
KNN | K-nearest neighbors |
PPV | Positive predictive value |
NPV | Negative predictive value |
ROC-AUC | Receiver operating characteristic-area under curve |
PiN | P-type/Intrinsic/N-type (semiconductor layers) |
VBk | breakdown voltage |
TP | true positive |
TN | True negative |
FP | False positive |
FN | False negative |
F1 | F1 score (harmonic mean of precision and recall) |
