Figure 1
From: On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures
(a) Schematic of the Chirped GMR structure; (b) SEM cross-section of the grating, with a period of 430Â nm and a groove size of 128Â nm, so the fill-factor is 0.7; (c) Schematic of the set-up used for testing; (d) Surface image of the sensor showing the resonance bar at a fixed wavelength of 647Â nm.
