Figure 1
Schematics of the subwavelength metamaterial surface grating coupler on the α-Si/SiN platform. (a) 3D view with labelled coordinates used in calculation of grating curvature; the SiO2 buffer layer is transparent (not shown in (a), to ease visualization. (b) Side (x–y plane) and (c) top (x–z plane) views of the structure.
