Figure 2

Grating directionality as a function of the (a) α-Si and oxide buffer thicknesses and (b) grating period and duty cycle. Grating directionality and forward transmittance as a function of the (c) buffer oxide thickness and (d) BOX thickness.

Grating directionality as a function of the (a) α-Si and oxide buffer thicknesses and (b) grating period and duty cycle. Grating directionality and forward transmittance as a function of the (c) buffer oxide thickness and (d) BOX thickness.